Comparison ledger
Applied Materials 0010-13622 RF Match for, Leybold Syrus Pro 710 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Syrus Pro 710 VacuumLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Leybold Syrus |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | Stainless steel chamber with flat door of aluminum[2] |
| Model | 0010-13622[1] | Syrus Pro 710 Vacuum[2] |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Chamber inner diameter | — | 700 mm[2] |
| Pirani transmitter range | — | 1000 mbar to 10E-3 mbar[2] |
| Bayard Alpert transmitter range | — | 10E-3 mbar - 10E-9 mbar[2] |
| Line voltage | — | 3AC400V/230V/+/-10%[2] |
| Line frequency | — | 50 Hz (60 Hz optional)[2] |
| OEM | — | Leybold[2] |
| Category | — | Deposition[3] |
| Type | — | vacuum coater[2] |
| Chamber | — | stainless steel chamber with flat aluminum door[2] |
| Viewing port | — | 1 viewing port with polarization filter[2] |
| Vacuum chamber | — | water-cooled[2] |
| Water distribution system | — | for warm and cold water[2] |
| Compressed air distribution system | — | present[2] |
| Control system | — | SYRUSpro control system[2] |
| Main electrical cabinet location | — | assembled on right hand side of vacuum chamber[2] |
| Vacuum measurement equipment | — | 2 Pirani transmitters, 1 Ionivac transmitter, 1 Penningvac transmitter[2] |
| Electrical connection point | — | 3-phases, full loaded Neutral, PE[2] |
| Vintage | — | 2008[2] |
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