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Comparison ledger

0010-13622 RF Match forversusIndy Plus

Applied Materials 0010-13622 RF Match for, Tokyo Electron Indy Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Indy PlusTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forTokyo Electron Indy
Cited variants—
  • Indy Plus ALD[1]
  • Indy Plus Etcher[2]
  • INDY PLUS BCD POLY[3]
  • Indy Plus-A-M[4]
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[5]Poly[1]
Model0010-13622[5]Indy Plus[1]
Product TypeRF Match for PVD (Physical Vapor Deposition)[5]—
FeatureHigh Efficiency HE RF Match-Bias[5]—
OEM—Tokyo Electron[6]
Category—Deposition[6]
Process—ALD (Atomic Layer Deposition)[1]
Description—BCD POLY[3]
Wafer size—300 mm[4]
Vintage—2016[4]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]agsemiconductor.comagsemiconductor.com
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com