Tokyo Electron
Indy Plus
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedA deposition machine in this class is process equipment used to place a controlled layer of material onto a substrate. The resulting film may serve as a conductor, insulator, barrier, seed layer, or functional surface depending on the process chemistry and the device being built.
How it works
General reference — not yet source-verifiedDuring processing, the machine controls the environment around the substrate so the film forms with the desired adhesion, coverage, and uniformity. The process is typically managed through coordinated control of chamber conditions, material delivery, substrate handling, and timing, with the goal of producing a stable and repeatable film suitable for downstream patterning or integration.
What do the numbers mean?
Wafer handling1
Configuration & options9
- Poly[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Indy Plus ALD | — | 2009 | Described as ALD (Atomic Layer Deposition); one record describes it as Poly 2009 Vintage. | Equipment inventory listing[1] |
| Indy Plus Etcher | — | — | Described as an etcher. | Equipment inventory listing[3] |
| INDY PLUS BCD POLY | — | 2010 | Described as BCD POLY and listed with version 300 mm and vintage 01.07.2010. | fabsurplus.com[4] |
| Indy Plus-A-M | — | 2016 | Described as Low Temperature Nitride with wafer size 300 mm. | agsemiconductor.com[5] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Indy Plus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Indy Plus are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Indy Plus are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Indy Plus are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Indy Plus is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Indy Plus are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
- [4]fabsurplus.com — fabsurplus.comfabsurplus.com
- [5]agsemiconductor.com — agsemiconductor.comagsemiconductor.com
Last updated Oct 13, 2026.
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