Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Rainbow 4520 i Oxide, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Rainbow 4520 i OxideLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Rainbow 4520 i Oxide |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | Rainbow 4520 i[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Damage/Missing parts list | — | Pumps, chillers, and support items may not be included[3] |
| Phase | — | 3 Phase[4] |
| Configuration | — | 208 Volt[4] |
| Make | — | Lam[3] |
| Equipment type | — | Oxide Etcher[3] |
| Wafer size | — | 8 inch[3] |
| Vintage | — | 1996[3] |
| Electrical | — | 3 Phase - 208 Volt[4] |
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