Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusRegulus8100

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi Regulus8100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi Regulus8100
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Tool designation—SEM-Hitachi-Regulus8100[2]
Tool type—Scanning electron microscope (SEM)[2]
Manufacturer / OEM—Hitachi[2]
Designation as listed—SEM-Hitachi-Regulus8100[2]
Facility classification—METROLOGY[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanousers.mit.edunanousers.mit.edu