Hitachi
Regulus8100
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Plate 01北科材資 Hitachi Regulus 8100 場發射式掃描式電子顯微鏡 FEG SEM 介紹影片
北科材資（北工礦冶）Watch on YouTube
What it is
General reference — not yet source-verifiedScanning electron microscopes form high-resolution images of samples by rastering a focused electron beam across the surface and detecting emitted electrons or other signals.
How it works
General reference — not yet source-verifiedThe Hitachi Regulus8100 functions as a scanning electron microscope. An electron gun generates a beam of electrons that is focused by electromagnetic lenses into a fine probe.
Scan coils deflect the electron beam in a raster pattern across the specimen. Detectors collect secondary electrons, backscattered electrons, and other signals produced by beam-sample interactions.
Where it fits in the process flow
General reference — not yet source-verifiedUpstream processes define the features to be measured; downstream, the SEM data may feed into process control systems or defect analysis workflows.
Applications
General reference — not yet source-verifiedApplications of the Hitachi Regulus8100 include critical-dimension measurement, defect review, and failure analysis of semiconductor devices.
The instrument is also used for materials characterization in research and development, such as examining cross-sections of microelectronic structures.
What do the numbers mean?
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Regulus8100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Regulus8100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Regulus8100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Regulus8100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Regulus8100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Regulus8100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]nanousers.mit.edu — nanousers.mit.edunanousers.mit.edu
- [2]https://nanousers.mit.edu/sites/default/files/documents/Fab.nano%20Equipment%20Rates%20START.nano%20March%202026_0.pdf — nanousers.mit.edunanousers.mit.edu
- [3]https://nanousers.mit.edu/sites/default/files/documents/Fab.nano%20Equipment%20Rates%20March%202026.pdf — nanousers.mit.edunanousers.mit.edu
Last updated Oct 10, 2026.
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