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Comparison ledger

0010-18024 Pyrometer Assemblyversus2351

Applied Materials 0010-18024 Pyrometer Assembly, KLA 2351, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
2351KLA
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer Transfer System
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA 2351
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]With HDD & Software[2]
Load Port Qty—2[2]
Wavelength Illumination—370~720 nm[2]
Wavelength Band—Visible, UV[2]
Pixel Size—0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[2]
Array Defect Capture Rate—≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2]
Array False Defect Rate—≤1.5%(all sizes)[2]
Random Defect Capture Rate—≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2]
Random False Defect Rate—≤1.5% (all sizes)[2]
Repeatability—≥90% (20 consecutive run on the same DSW wafer)[2]
Wafer size—Wafer Transfer System[2]
Wafer Sizes—8 inch; 12 inch[3]
Pixel Sizes—0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[2]
Vintage—2002[2]
Illumination Wavelength—370~720 nm[2]
Load Port Quantity—2[2]
User Interface—Monitor, Workstation, Keyboard, Trackball, Joystick[2]
Main Body Components—Inspection Station, Wafer Transfer System, Stage[2]
Includes—HDD & Software, External Blower, Power Line Conditioner[2]
Make—KLA[2]
Model—2351[2]
Main Body—Inspection Station; Wafer Transfer System; Stage[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing