KLA
2351
The KLA 2351 is an inspection system used for wafer defect detection. The KLA 2351 supports 8 inch and 12 inch wafer sizes. The KLA 2351 uses a wavelength illumination of 370–720 nm, covering visible and UV bands.[1][2]
Wafer size
Wafer Transfer System
Optics
370~720 nm[1]
What it is
General reference — not yet source-verifiedWafer inspection systems examine patterned or unpatterned wafers for defects and other yield-relevant anomalies. Wafer inspection systems are part of semiconductor metrology and inspection, where they provide information used to monitor process stability and trigger review or disposition of suspect wafers.
How it works
General reference — not yet source-verifiedWafer inspection systems direct controlled illumination onto the wafer and collect the returned optical signal to detect deviations from expected pattern or surface behavior. Wafer inspection systems commonly combine precision wafer handling, scanning motion, image acquisition, and defect classification software so that suspected defects can be mapped for follow-on analysis.
Where it fits in the process flow
The KLA 2351 is positioned for critical line monitoring applications. The KLA 2351 belongs to a class of tools used for production inspection and excursion monitoring.[5]
Applications
General reference — not yet source-verifiedWafer inspection systems are used to find pattern defects, particles, scratches, residue, and other surface or pattern anomalies that can affect device yield. Wafer inspection systems support process development, process monitoring, excursion detection, and investigation of repeating or random defect mechanisms across semiconductor manufacturing.
What do the numbers mean?
Wafer handling8
Optics & imaging3
Control & software4
Configuration & options22
- External Blower[1]
- Power Line Conditioner[1]
- Array Defect Capture Rate
- ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[1]
- Random Defect Capture Rate
- ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[1]
- Monitor[1]
- Workstation[1]
- Keyboard, Trackball, Joystick[1]
- Main Body:[1]
- Inspection Station[1]
- Stage[1]
- Refurbished[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 2351 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2351 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2351 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2351 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2351 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2351 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]Inventory photo
- [4]Inventory photo
- [5]KLA Tencor | AIT UV High-Throughput, High-Sensitivity Wafer Inspection - Certified Used Equipment — kla-tencor.com (Jan 7, 2011)web.archive.org
Last updated Oct 18, 2026.
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