KLA
2351
Wafer size
Wafer Transfer System
Optics
370~720 nm[1]
What is it?
What do the numbers mean?
Wafer handling2
Optics & imaging2
Control & software2
Configuration & options15
- External Blower[1]
- Power Line Conditioner[1]
- Array Defect Capture Rate
- ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[1]
- Random Defect Capture Rate
- ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[1]
- Monitor[1]
- Workstation[1]
- Keyboard, Trackball, Joystick[1]
- Main Body:[1]
- Inspection Station[1]
- Stage[1]
- Refurbished[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2351 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2351 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2351 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2351 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2351 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2351 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
- [5]KLA Tencor | AIT UV High-Throughput, High-Sensitivity Wafer Inspection - Certified Used Equipment — kla-tencor.com (Jan 7, 2011)web.archive.org
Last updated Jul 29, 2026.
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