Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusNWL 851

Applied Materials 0010-18024 Pyrometer Assembly, Nikon NWL 851, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
NWL 851Nikon
OEMApplied MaterialsNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyNikon NWL 851
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Make—Nikon[2]
Model—NWL 851[2]
Wafer size—8 inch[2]
Type—Wafer loader[3]
Stage—Large 8-inch compatible stage[3]
Stage travel—X-Y stroke 205 mm[3]
Rotating holder—8-inch rotating holder[3]
Observation methods—Reflected bright field / reflected dark field[3]
Objective lenses—CF Plan 5× BD NA0.135 / 10× BD NA 0.30 / 50× BD NA 0.80[3]
Eyepiece—CFIUW 10/25× 2 (magnification 10×, field of view 25 mm)[3]
Illumination device—LA 150 UX halogen lamp, 150 W[3]
Revolver—ACP 21 with motorized switching controller (5 holes)[3]
Tube—3 erect images, with C-mount adapter[3]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com