NWL 851

Wafer loaders and wafer microscopes are metrology and inspection tools used to position a wafer under an optical system for human observation or image capture. Tools in this class support visual review of surface features, defects, alignment marks, and pattern conditions during engineering, failure analysis, and production support.

The Nikon NWL 851 uses a large eight-inch compatible stage and an eight-inch rotating holder. The Nikon NWL 851 provides an X-Y stroke of 205 mm on its stage. The Nikon NWL 851 includes reflected bright field and reflected dark field observation methods. The Nikon NWL 851 includes a motorized revolver and a C-mount adapter. The Nikon NWL 851 supports observation with CF Plan objectives, CFIUW eyepieces, and LA 150 UX halogen illumination. The Nikon NWL 851 is specified with an ACP 21 revolver with motorized switching controller and five holes.^[1]

The Nikon NWL 851 is compatible with eight-inch wafers. The Nikon NWL 851 combines wafer handling with reflected-light observation features used for wafer review.^[1][2]

The Nikon NWL 851 supports reflected bright field and reflected dark field observation. The Nikon NWL 851 supports observation with CF Plan objectives, CFIUW eyepieces, and halogen illumination.^[1]