Waferpedia

Comparison ledger

0010-21246 PartversusFlexus 5400

Applied Materials 0010-21246 Part, KLA Flexus 5400, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA Flexus 5400
Specifications
Wafer Size—200mm (8 inch), 150mm[1]
Technology—Dual wavelength[2]
Throughput—Up to 60 wafers per hour[2]
Minimum Scan Step—0.02mm[1]
Maximum Points Per Scan—1250[1]
Sources (4)Every fact above is drawn from these public sources
  1. [1]wotol.comwotol.com
  2. [2]capexoutsource.comcapexoutsource.com
  3. [3]conationtech.comconationtech.com
  4. [4]Equipment inventory listing