KLA
Flexus 5400
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
What do the numbers mean?
Wafer handling5
Optics & imaging1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the KLA Flexus 5400 support?
The KLA Flexus 5400 supports 150 mm and 200 mm (8 inch) wafers.[3][4]
What is the throughput of the Flexus 5400?
The system can achieve a throughput of up to 60 wafers per hour.[2]
What is the minimum scan step of the Flexus 5400?
The minimum scan step is 0.02 mm.[1]
What is the maximum number of points per scan?
The maximum points per scan is 1250.[1]
What measurement technology does the Flexus 5400 use?
The system uses dual wavelength technology.[2]
Not publicly documented
The following facts about the Flexus 5400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Flexus 5400 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Flexus 5400 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Flexus 5400 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Flexus 5400 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Flexus 5400 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]wotol.com — wotol.comwotol.com
- [2]capexoutsource.com — capexoutsource.comcapexoutsource.com
- [3]conationtech.com — conationtech.comconationtech.com
- [4]Equipment inventory listing
Last updated Aug 20, 2026.
