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0010-22161 High EFF RF Matchversus199

Applied Materials 0010-22161 High EFF RF Match, YES 199, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
199YES
OEMApplied MaterialsYES
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FamilyApplied Materials 0010-22161 High EFF RF MatchYES 199
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Document topic—Processing procedures for BCB adhesion[3]
Material family—Cyclotene Advanced Electronic Resins / benzocyclobutene (BCB)[3]
Adhesion promoters discussed—AP3000 and AP8000[3]
Recommended adhesion promoters—AP3000 and AP8000 are the only adhesion promoters recommended for use with BCB[3]
Recommended pre-clean—O2 plasma, with or without water rinse[3]
Preferred plasma tool type—RIE-type plasma tools[3]
Adhesion test methods—Tape peel, modified edge lift-off (m-ELT), and bump shear[3]
Tape peel standard—ASTM D-3359-93[3]
Pressure cooker test conditions—121°C, 2 atmospheres pressure, 100% relative humidity[3]
Thickness example—BCB bump shear squares are typically 100 μm x 100 μm[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu