Comparison ledger
Applied Materials 0010 47763, Lam Research 716 069688 809 ESC Assy, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | 716 069688 809 ESC AssyLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research 716 069688 809 ESC Assy |
| Cited variants | — | |
| Specifications | ||
| Configuration | 2nd Source New[3] | Inner, SI W/ Stud, Socket[1] |
| Type | Monopolar Dual Heated[4] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[5] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4] | — |
| Model | 0010-47763[3] | 716 069688 809[1] |
| OEM | Applied Materials[3] | Lam[1] |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[4] | — |
| Quantity available (source) | 1[4] | — |
| Part number | 0010-47763[4] | — |
| Component type | Electrostatic chuck (ESC) assembly[6] | — |
| Designation | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[5] | — |
| Wafer size reference | 300 mm[7] | — |
| Associated part number | 0041-39086[8] | — |
| Product type | — | ESC Assy[1] |
| Variant detail | — | Inner, SI W/ Stud, Socket[1] |
| Manufacturer | — | Lam[1] |
| Assembly designation | — | ESC Assy[1] |
| Description (listing A) | — | Inner, SI W/ Stud, Socket[1] |
| Description (listing B) | — | Inner, SI[2] |
| Product description | — | ESC Assy Inner, SI[2] |
| Asset # | — | 147371[2] |
| Last Confirm Date | — | December 10, 2025[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →