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Comparison ledger

0020 17484 PartversusE 306 A

Applied Materials 0020 17484 Part, Edwards E 306 A, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
E 306 AEdwards
OEMApplied MaterialsEdwards
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartEdwards E 306 A
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]With a CT-200 cryopump and an Oil based Edwards roughing pump[2]
Tool type—Coater[3]
Vacuum & pumping—With a CT-200 cryopump and an oil based Edwards roughing pump[3]
Features—2ea rotating shields that keep deposition and heat off of the belljar[2]
Known issue / consumable note—The thermal baskets need to be replaced as they are expendable items[2]
Included instrumentation—Ion gauge[3]
Category—Deposition[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com