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0020 17484 PartversusGasonics Vector Extreme

Applied Materials 0020 17484 Part, Lam Research Gasonics Vector Extreme, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
Gasonics Vector ExtremeLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartLam Research Gasonics Vector
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]Process Module Options:[2]
Software Version & Build—V5.2[2]
Label Kit—English[2]
Interconnect Cable Length—75 ft[2]
Non-Standard System Features—System NSR 1, System NSR 2[2]
Primary Process—SION[2]
Secondary Process—ARC, USG[2]
RCP Generator—AX 7645[2]
RF Config—SIRF[2]
Top Plate Tubing Size—1/4 in[2]
Chamber Hardware—Nickel Plated Standard[2]
Chamber Gate Valve—Chemraz[2]
HF Generator—Apex 3 KW[2]
LF Generator—PDX 2500[2]
RF Sensor Board—Standard[2]
IREPD Controller—MKS 20704 A 28818, RMU[2]
Software Version and Build—V5.2[3]
Make—Lam / Novellus / Gasonics[2]
Model—Vector Extreme[2]
Process type—Plasma-Enhanced Chemical Vapor Deposition (PECVD)[2]
Wafer size—12 inch[2]
Secondary processes—ARC, USG[3]
RPC generator—AX 7645[3]
RF configuration—SIRF[3]
Load lock pump—Kashiyama NV60[3]
Control era—Windows XP[3]
O-Rings—Chemraz[2]
Process Manometer—Heated[2]
View Ports—5 Viewpoints[2]
Pedestal Options—Classic conditioned 300 mm[2]
Minimum Contact Area (MCA)—Pin & Ball[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing