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Comparison ledger

0020 17484 PartversusHelios 800

Applied Materials 0020 17484 Part, Leybold Helios 800, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
Helios 800Leybold
OEMApplied MaterialsLeybold
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartLeybold Helios 800
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]1 x Transfer module w/ vacuum robot incl. Gate valve[2]
Line voltage—3AC400V+/-10%[2]
Line frequency—50 Hz[2]
Manufacturer—Leybold[2]
Model—Helios 800[2]
Category—Deposition[3]
Type—Sputter coater[2]
Transfer module—1 x Transfer module w/ vacuum robot incl. Gate valve[2]
Load lock modules—3 x Load lock modules w/ gate valve & cassette for 12 substrate carriers[2]
Vacuum equipment—1 set vacuum equipment including dry pre-vacuum pump unit, turbo molecular pump, vacuum gauges, vacuum pipes & valves[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com