Waferpedia

Comparison ledger

0020 17484 PartversusBJD 2000

Applied Materials 0020 17484 Part, Temescal BJD 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
BJD 2000Temescal
OEMApplied MaterialsTemescal
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartTemescal BJD 2000
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]Batch loading vacuum chamber w/ 20" diameter hinged bell jar[2]
With—Two sets of removable shields for cleaning[2]
E-Beam Controller—Inficon Model XTC/3[2]
Process Controller—CTI Model CT-8 Onboard[2]
Power—6 KW EBeam Power Supply[3]
Type—Batch-loading vacuum chamber evaporator[3]
Bell jar—20" diameter hinged bell jar[2]
Load-lock status—Non-load-locked[4]
Vacuum pumping—Roughing Pump[3]
Sources supported—Multiple electron beam and resistance sources[4]
Source-to-substrate distance—Standard 19.5"; optional source well extension collar 27.5"[4]
EBeam gun—STIH-270-2CK[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]temescal.ferrotec.comtemescal.ferrotec.com