Waferpedia

Temescal

BJD 2000

DepositionTemescal BJD 2000 family
Research Quality: 30% complete
BJD 2000 — Inventory photo
Fig. 01BJD 2000Inventory photo[1]

Power

6 KW EBeam Power Supply[1]

Vacuum

Roughing Pump[1]

What is it?

The Airco / Temescal BJD 2000 is a batch-loading vacuum chamber evaporator with a 20-inch diameter hinged bell jar.

What do the numbers mean?

Power & electrical1

Power
6 KW EBeam Power Supply[1]
Accurate?

Vacuum & pumping2

Batch loading vacuum chamber w/ 20" diameter hinged bell jar[1]
Accurate?
Roughing Pump[1]
Accurate?

Control & software2

E-Beam Controller
Inficon Model XTC/3[1]
Accurate?
Process Controller
CTI Model CT-8 Onboard[1]
Accurate?

Configuration & options6

Bell jar can be installed and mounted in one of two orientations for approach and loading[1]
Accurate?
Electric hoist actuation of source tray flange for easy maintenance[1]
Accurate?
With
Two sets of removable shields for cleaning[1]
Accurate?
Spare KF flange-port for RGA or alternate access[1]
Accurate?
EBeam Gun STIH-270-2CK[1]
Accurate?
Lift-Off Dome[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationBatch loading vacuum chamber w/ 20" diameter hinged bell jar[1]
  • ConfigurationRoughing Pump[1]
  • Power6 KW EBeam Power Supply[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the BJD 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BJD 2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the BJD 2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the BJD 2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the BJD 2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the BJD 2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Temescal XTC Deposition Controllerstemescal.net (Jun 1, 2013)web.archive.org
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Last updated Jul 29, 2026.

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