Comparison ledger
Applied Materials 0020 17484 Part, Temescal FC-1800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 17484 PartApplied Materials | FC-1800Temescal |
|---|---|---|
| OEM | Applied Materials | Temescal |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 17484 Part | Temescal FC-1800 |
| Specifications | ||
| Configuration | Bar, Cap Bank, Hdpcvd 300mm Ultima X[1] | — |
| System type | — | Deposition system[2] |
| Spare parts kit | — | FC-1800 O-ring Spares Kit; replacements for all O-rings used on Temescal FC-1800 systems; part no. 0515-9270-0[2] |
| Shields kit | — | FC-1800 Shields Kit; includes main section shield and dome shield; part no. 0615-7071-0[2] |
| Tripod stand assembly | — | TP-8-20 Tripod Stand Assembly for Temescal FC-1800 system; used with TP-8-20 lift-off domes; part no. 0626-3934-0[3] |
| Planetary fixture | — | HSP-20 Planetary Fixture for Temescal FC-1800 system; used with HSP-20 planets; part no. 0615-8084-0[3] |
| TP-8-20 dome options | — | For the FC-1800 system, TP-8-20 domes are listed for 2-inch wafers (capacity 12), 3-inch wafers (capacity 17), and 100-mm wafers (capacity 13); dome diameter is 17.25 inches and spherical radius is 19.5 inches.[3] |
| HSP-20 planet options | — | For the FC-1800 system, HSP-20 planets are listed for 2-inch wafers (capacity 22), 3-inch wafers (capacity 12), 100-mm wafers (capacity 4 or high-capacity 6), 125-mm wafers (capacity 3 or high-capacity 4), and 150-mm wafers (capacity 2); planet diameter is 11.875 inches and spherical radius is 8.5 inches.[3] |
| Description | — | standard e-beam evaporator[5] |
| Crucible system | — | six-pocket crucible system[4] |
| Source pockets | — | three 15 cc pockets and three 7 cc pockets[6] |
| Substrate capacity | — | up to three 156 mm solar substrates or smaller sizes, including pieces[5] |
| Rotating substrate stage | — | 7.5 inch diameter water-cooled rotating substrate stage[6] |
| Substrate stage speed | — | 5 to 100 RPM[6] |
| Standard wafer capacity | — | one 6 inch diameter wafer or small pieces using standard spring clips[6] |
| Processes defined | — | Ti, Pt, Ag, and Al evaporation[5] |
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