Temescal

FC-1800

Research Quality: 20% complete

TemescalFC-1800

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Plate 01Temescal FC-1800 video showing loadlock, top chamber, bottom chamber
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Plate 02Temescal FC-1800
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Plate 03Temescal FC-1800 Automatic Deposition Process Demo - Part 1
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Plate 04Temescal FC-1800 E-Beam evaporator used semiconductor equipment
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Plate 05Temescal FC-1800 Auto Vent
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Plate 06Temescal FC-1800 Automatic Deposition Process Demo - Part 3
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What is it?

The sources identify the FC-1800 as one of Temescal's standard deposition systems. Documented FC-1800-related items include an O-ring spares kit, a shields kit, a TP-8-20 tripod stand assembly, HSP-20 planetary fixtures, and TP-8-20 domes for 2-inch, 3-inch, and 100-mm wafers.

What do the numbers mean?

Wafer handling2

TP-8-20 dome options: For the FC-1800 system, TP-8-20 domes are listed for 2-inch wafers (capacity 12), 3-inch wafers (capacity 17), and 100-mm wafers (capacity 13); dome diameter is 17.25 inches and spherical radius is 19.5 inches.^[2]
HSP-20 planet options: For the FC-1800 system, HSP-20 planets are listed for 2-inch wafers (capacity 22), 3-inch wafers (capacity 12), 100-mm wafers (capacity 4 or high-capacity 6), 125-mm wafers (capacity 3 or high-capacity 4), and 150-mm wafers (capacity 2); planet diameter is 11.875 inches and spherical radius is 8.5 inches.^[2]

Configuration & options5

System type: Deposition system^[1]
Spare parts kit: FC-1800 O-ring Spares Kit; replacements for all O-rings used on Temescal FC-1800 systems; part no. 0515-9270-0^[1]
Shields kit: FC-1800 Shields Kit; includes main section shield and dome shield; part no. 0615-7071-0^[1]
Tripod stand assembly: TP-8-20 Tripod Stand Assembly for Temescal FC-1800 system; used with TP-8-20 lift-off domes; part no. 0626-3934-0^[2]
Planetary fixture: HSP-20 Planetary Fixture for Temescal FC-1800 system; used with HSP-20 planets; part no. 0615-8084-0^[2]

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Field notes

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Not publicly documented

The following facts about the FC-1800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FC-1800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FC-1800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FC-1800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FC-1800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FC-1800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report