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Comparison ledger

0720 06060 PartversusEPS150TRIAX

Applied Materials 0720 06060 Part, Cascade Microtech EPS150TRIAX, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0720 06060 PartApplied Materials
EPS150TRIAXCascade Microtech
OEMApplied MaterialsCascade Microtech
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0720 06060 PartCascade Microtech EPS150TRIAX
Specifications
ConfigurationContact Pin 24-20 Awg Crimp Gold Flash[1]—
OEM—Cascade MicroTech[2]
Model—EPS150TRIAX[2]
Equipment type—Probe Station[2]
Enclosure—Light shield enclosure[2]
Measured quantities—Current, voltage, resistance, capacitance, conductance[2]
Capacitance and conductance measurement range—20 Hz to 1 MHz[2]
Applications—I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[2]
Microscope—Trinocular 6.7x stereo zoom microscope with 100x magnification[2]
Motion axes—Micropositioner movement in x, y, and z[2]
Probe station model—Cascade MicroTech EPS150TRIAX Probe Station[2]
Application—150 mm manual probing solution for low-noise measurements[3]
Wafer size—150 mm[4]
Measurement capabilities—Current, voltage, resistance, capacitance and conductance[2]
Capacitance and conductance frequency range—20 Hz to 1 MHz[2]
Triaxial chuck—Dedicated triaxial chuck with <± 5 μm planarity[4]
Chuck movement—Chuck X/Y movement with < 5 μm resolution[4]
Contact/separation stroke—Unique 200 μm platen contact/separation stroke[4]
Probe placement repeatability—1 μm repeatability[4]
Probe tips—PTT probe tips with 7 μm tip radius[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]smif.pratt.duke.edusmif.pratt.duke.edu
  3. [3]electronicsdatasheets.comelectronicsdatasheets.com
  4. [4]img1.17img.cnimg1.17img.cn