Comparison ledger
Applied Materials Sigmameltec MRC 9000 Mask, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Sigmameltec MRC 9000 MaskApplied Materials | 1000PYES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Sigmameltec MRC 9000 Mask | YES 1000P |
| Specifications | ||
| Configuration | In the Chemical Supply Unit, one Filter is Dislodged[1] | Parallel plate[4] |
| Sensor | Unaffected[1] | — |
| Chemical Supply Unit | Present[1] | — |
| O3 Water Supply unit | Present[1] | — |
| Power Box | Present[1] | — |
| Vacuum Pump, Chiller, Critical Parts | Present[1] | — |
| Main Tool (Dry Clean Unit) | Present[1] | — |
| Main Tool (Wet Clean Unit) | Present[1] | — |
| Manufacturer | Applied Materials[2] | — |
| Model | Sigmameltec MRC 9000 Mask[1] | 1000P[3] |
| Category | Wet Processing / Clean[2] | — |
| Tool type | wet cleaning system for photomasks[2] | — |
| Included section | dry clean unit[2] | — |
| Observed issue | one filter is dislodged in the chemical supply unit[1] | — |
| Observed condition | main tool (dry clean unit) sensor unaffected with no visible damage[1] | — |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
| Type | — | Plasma cleaning system[3] |
| Shelves | — | Four 16 x 16 inch shelves[3] |
| Control | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
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