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Comparison ledger

VIISta HCP+ High Currentversus200 PCU

Applied Materials VIISta HCP+ High Current, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
VIISta HCP+ High CurrentApplied Materials
200 PCUAxcelis
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2000 Vintage
Control system——
Generation——
FamilyApplied Materials VIISta HCP+ High CurrentAxcelis NV GSD 200
Cited variants—
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
Specifications
Process TypeHigh Current Implanter[3]—
Wafer Size300 mm[3]—
Manufacturing Year2006[4]—
Manufacturing Date01.10.2007[3]—
P/N—SC 4840 A[5]
Frequency—50 Hz[5]
Phase—3 Phase[5]
Voltage—400 V[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]Equipment inventory listing
  5. [5]inventory listing