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Comparison ledger

VIISta Plad High Currentversus160 XP Ion

Applied Materials VIISta Plad High Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
VIISta Plad High CurrentApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISTAVarian 160 XP Ion
Specifications
ConfigurationChamber only[1]150mm High Current IMP[2]
ManufacturerApplied Materials[1]—
CategoryIon Implantation[1]Ion Implantation[2]
Tool typeHigh current ion implanter[1]ion implanter[2]
Wafer size12-inch[1]—
OEM—Varian[3]
Model—160 XP Ion[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing