Comparison ledger
ASM A 400, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | A 400ASM | |
|---|---|---|
| OEM | ASM | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASM A 400 | Varian 0332 F 9453 302 Diffusion |
| Cited variants | — | |
| Specifications | ||
| Configuration | Wet Ox / Wet O[1] | — |
| Vintage | 2008 | — |
| Furnaces / Diffusion Vintage | 2008 | — |
| Wafer Size | 8 inch (200 mm)[1] | — |
| Process Capabilities | Oxidation/Diffusion, LPCVD, ALD[5] | — |
| Configured Processes (sourced listings) | Wet Ox/Wet O, TEOS/Nitride, Poly/Nitride, BPSG[1] | — |
| Processes | Oxidation, Diffusion, LPCVD, ALD[5] | — |
| Type | Batch Vertical Furnace[5] | — |
| Model | A 400[1] | 0332 F 9453 302[6] |
| Product type | Batch vertical furnace[5] | — |
| Asset Number | — | 142841[6] |
| Last Confirm Date | — | October 14, 2025[7] |
| Make | — | Varian[6] |
| Category | — | Thermal / Diffusion[8] |
| Tool type | — | diffusion pump[8] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →