Comparison ledger
ASM Epsilon 2000, ASM Epsilon E 2000 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Epsilon 2000ASM | |
|---|---|---|
| OEM | ASM | ASM |
| Category | Deposition | — |
| Wafer size | 150mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASM Epsilon | ASM Epsilon |
| Specifications | ||
| Supply Voltage/ Freq | 480/ 50[1] | — |
| System Hand | Right Hand[1] | — |
| Monitor Type | Flat Panel[1] | — |
| Wafer Size | 150mm[2] | — |
| Maint Console | Mini Maint[1] | — |
| CPU | 68040[1] | — |
| Software Version | 7.65[1] | — |
| Comms | HSMS[1] | — |
| RP/ ATM | RP[1] | — |
| Vacuum Load Locks | No[2] | — |
| WHC Gate Valve | Swing[1] | — |
| WHC Robot Arm | Wide[1] | — |
| Reactor Isolation | HVA[1] | — |
| ATM Valve | VAT[1] | — |
| Pressure Controller | MKS 152 Analogue[1] | — |
| PCV Type | MKS 253B[1] | — |
| Choke Valve | Yes[1] | — |
| RP Orientation | Bottom Feed[1] | — |
| Gas Panel Orientation | Top Feed[2] | — |
| Main H2/N2 | 100slm[1] | — |
| Process type | CVD (Chemical Vapor Deposition)[2] | — |
| Wafer sizes supported | 150 mm and 200 mm wafers[4] | — |
| Tool type | single-wafer epitaxy tool[4] | — |
| Supply voltage/frequency | 480/50[2] | — |
| Manufacturer | ASM[2] | — |
| Model | Epsilon 2000[2] | — |
| Configuration | — | RP & SiGe[5] |
| Leak Detector | — | H2, HCL for RIKEN KEIKI[5] |
| SIDE CAR | — | H2, N2, HCL Purefire[5] |
| GAS | — | H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[5] |
| MFC | — | Horiba STEC Z500 series[5] |
| Special | — | Veeco LOREX 15slm model included[5] |
| Wafer Sizes | — | 4 inch[5] |
| Vintage | — | 2011[5] |
| Gases | — | H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS[5] |
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