Comparison ledger
ASM Epsilon 2000 Heat Exchanger, Heller 1088, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | |
|---|---|---|
| OEM | ASM | Heller |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASM Epsilon 2000 Heat Exchanger | Heller 1088 |
| Specifications | ||
| Manufacturer | ASM[1] | — |
| Model | Epsilon 2000 Heat Exchanger[1] | — |
| Category | Thermal / Diffusion[2] | — |
| Type | temperature-control unit[2] | — |
| Wafer sizes supported | 150 mm and 200 mm wafers[3] | — |
| Heating Zones | — | 8 zones (4 top and 4 below) plus 1 cooling zone[4] |
| Heating Method | — | Forced convection[4] |
| Conveyor Width | — | 18 inches (45 cm)[4] |
| Heated Length | — | 43.5 inches (111 cm)[4] |
| Overall Length | — | 96 inches (244 cm)[4] |
| Height | — | 50 inches (127 cm)[4] |
| Net Weight | — | 900 lbs (409 kg)[4] |
| Thermal Profiler | — | Included[4] |
| Oven Top | — | Counter balance for easy access to conveyor[4] |
| Solder Compatibility | — | Lead-free and leaded soldering[4] |
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