Comparison ledger
ASML PAS 5500 850 D, Brooks 017-0146-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PAS 5500 850 DASML | 017-0146-01 PrealignerBrooks |
|---|---|---|
| OEM | ASML | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML PAS 5500 | Brooks 017-0146-01 Prealigner |
| Specifications | ||
| Substrates | R type, 1.2 mm Notch and flat wafers[1] | — |
| Configuration | Athena[1] | — |
| Wafer size | 6 inch[1] | — |
| Light source | Cymer ELS-6610[1] | — |
| Athena | Athena[1] | — |
| Make | ASML[1] | — |
| Model | PAS 5500 / 850 D[1] | — |
| Alignment system | Athena[2] | — |
| Tool type | scanner[1] | — |
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