ASML
PAS 5500 850 D
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The ASML PAS 5500/850 D is a scanner for 6-inch wafers, using a Cymer ELS-6610 light source and supporting R type, 1.2 mm notch and flat wafers.[1]
What it is
How it works
General reference — not yet source-verifiedA lithography scanner directs patterned light from a reticle through projection optics onto resist on the wafer surface. The exposure system uses coordinated motion between reticle and wafer stages so the image is scanned across the exposure field. Alignment subsystems measure wafer position relative to the mask pattern so successive layers can be registered to earlier patterning.
Where it fits in the process flow
General reference — not yet source-verifiedLithography scanners are used after wafer preparation and photoresist coating, and before development and pattern transfer. The patterned resist produced by the exposure step then serves as the masking image for subsequent etch, implant, deposition, or lift-off sequences, depending on the process module being built.
Applications
General reference — not yet source-verifiedLithography scanners are used to form patterned resist images for integrated-circuit and related microfabrication layers. Typical applications include defining active regions, gate or interconnect levels, contact or via openings, and other repeated layer patterns that require optical projection through a reticle.
What do the numbers mean?
Wafer handling2
Performance1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of lithography tool is the ASML PAS 5500/850 D?
What wafer size does the ASML PAS 5500/850 D support?
Not publicly documented
The following facts about the PAS 5500 850 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PAS 5500 850 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PAS 5500 850 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PAS 5500 850 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PAS 5500 850 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PAS 5500 850 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]ASML: Products - PAS 5500/1150C — asml.com (Jun 9, 2015)web.archive.org
Last updated Oct 19, 2026.
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