Comparison ledger
Asyst Versaport 2200 Indexer, Leica , Vistec INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Vistec INS 3000Leica | |
|---|---|---|
| OEM | Asyst | Leica |
| Category | — | — |
| Wafer size | 2nd EPROM has the firmware for wafer cassettes (in spare) | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Asyst Versaport 2200 | Leica , Vistec INS 3000 |
| Specifications | ||
| P.N | 9700-5384-01 REV.4- used for both mask cassettes and wafer cassettes[1] | — |
| Configuration | 2 EPROM chips:[1] | — |
| Wafer size | 2nd EPROM has the firmware for wafer cassettes (in spare)[1] | Single 150/200 mm wafer loadport[4] |
| Manufacturer | Asyst[1] | — |
| Model | Versaport 2200[1] | — |
| Part number | 9700-5384-01 REV.4[1] | — |
| Cassette type | 8” Cassette[1] | — |
| Mounting configuration | Bolt Back Plate[1] | — |
| RFID support | RFID Smart Tag support[1] | — |
| Firmware | 2 EPROM chips; 1st EPROM has firmware for mask cassettes (installed currently), 2nd EPROM has firmware for wafer cassettes (in spare)[1] | — |
| Cassette compatibility | Used for both mask cassettes and wafer cassettes[1] | — |
| Condition | Refurbished[1] | — |
| Sensor adjustment | The user just needs to adjust the sensor parameters via ISIM to work with your cassettes[2] | — |
| Technical manual | VersaPort 2200 Technical Manual, P/N 2000-1252-01, Rev. C, dated 6/12/2007[3] | — |
| Type | — | Optical defect review station[4] |
| Wafer loadport | — | Single 150/200 mm wafer loadport[4] |
| Lighting | — | Bright field light source; DIC DUV light source[4] |
| Camera | — | UV and DUV camera[4] |
| Optics | — | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[4] |
| Software | — | Viscon Software[4] |
| Data interface | — | KLARF input[4] |