Comparison ledger
Axcelis NV 6200 A Ion, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 6200 A IonAxcelis | 160 XPVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 6200 A Ion | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Source roughing pump needs replacement[2] | — |
| Manufacturer | Axcelis[2] | — |
| Model | NV 6200 A[2] | — |
| Equipment type | Ion Implanter[2] | — |
| Wafer size | 6 inch[2] | — |
| Vacuum & pumping | Source roughing pump needs replacement[3] | — |
| Gas & chemistry | Spare isolation transformer and gas boxes included[3] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
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