Comparison ledger
Axcelis NV 8250 P Medium Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 8250 P Medium CurrentAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 8250 | Varian 160 XP Ion |
| Specifications | ||
| Configuration | Retrofits:[1] | 150mm High Current IMP[3] |
| Tool type | Medium current implanter[2] | ion implanter[3] |
| Process category | Ion implantation[2] | — |
| Gas delivery | Z-Blok Gasbox (1 Gas string)[2] | — |
| Power | Cryo Compressor 9600V[2] | — |
| Vacuum | Without pre-vacuum pumps[2] | — |
| Optics | Parallel Lens NV8250P[2] | — |
| Retrofits | Vaporizer; Metal Reduction Kit; AMU Xantrex PS; OneDoseCup; Reduced surface Aligner[2] | — |
| OEM | — | Varian[4] |
| Model | — | 160 XP Ion[4] |
| Category | — | Ion Implantation[3] |
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