Comparison ledger
Axcelis NV GSD A 80, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV GSD A 80Axcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD A 80 | Varian 160 XP Ion |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Power | 30 KVA[1] | — |
| Voltage | 200 V[2] | — |
| Frequency | 50 Hz[2] | — |
| Gas | BF3, ASH3, AR[1] | — |
| Configuration | Pumps:[1] | 150mm High Current IMP[4] |
| P1 | Turbo Pump Mitsubishi PT 1500[1] | — |
| P2 | Cyro Pump Suzuki-Syokan A200[1] | — |
| P3 | Cryo Pump Suzuki-Syokan A300[1] | — |
| RP1 | Dry Pump Ebara A07V[1] | — |
| RP2 | Dry Pump Ebara A30V[1] | — |
| RP3 | Alcatel Drytel34[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | NV GSD A 80[1] | 160 XP Ion[5] |
| Equipment type | Ion implanter[3] | — |
| Wafer size | 8 inch[1] | — |
| Power rating | 30 KVA[1] | — |
| Gas delivery | BF3, ASH3, AR[1] | — |
| Pump P1 | Turbo Pump Mitsubishi PT 1500[1] | — |
| Pump P2 | Cyro Pump Suzuki-Syokan A200[1] | — |
| Pump P3 | Cryo Pump Suzuki-Syokan A300[1] | — |
| Pump RP1 | Dry Pump Ebara A07V[1] | — |
| Pump RP2 | Dry Pump Ebara A30V[1] | — |
| Pump RP3 | Alcatel Drytel34[1] | — |
| OEM | — | Varian[5] |
| Category | — | Ion Implantation[4] |
| Tool type | — | ion implanter[4] |
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