Comparison ledger
Axcelis VHE, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VHEAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | 8" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2001 Legacy | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis VHE | Varian 160 XP Ion |
| Specifications | ||
| Wafer size | 8" wafer convertible[1] | — |
| Configuration | Full disk 17 wafers[1] | 150mm High Current IMP[2] |
| Source | Bernas[1] | — |
| Extraction system | Triple axes[1] | — |
| Gases | Boron, Phosfine[1] | — |
| Max Implantation Energy | 5000 KeV[1] | — |
| Max Extraction Boltage | 90 KeV[1] | — |
| Orienter | Flat[1] | — |
| Make | Axcelis[1] | — |
| Model | VHE[1] | 160 XP Ion[3] |
| Wafer sizes | 6 inch[1] | — |
| Wafer convertible | 6 inch - 8 inch[1] | — |
| Full disk capacity | 17 wafers[1] | — |
| Wafer tilt | Included[1] | — |
| Max extraction voltage | 90 KeV[1] | — |
| Wafer convertible range | 6" - 8" wafer convertible[1] | — |
| Heat exchanger | Included[1] | — |
| Load and unload locks | Included[1] | — |
| Source extraction alignment jig | Included[1] | — |
| AMU | Included[1] | — |
| Beamline column | Included[1] | — |
| Mechanical clamp | Included[1] | — |
| PFS | HD 2001[1] | — |
| OEM | — | Varian[3] |
| Category | — | Ion Implantation[2] |
| Tool type | — | ion implanter[2] |
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