Axcelis
VHE
Wafer size
8"
Performance
Source Extraction Alignment Jig[1]
Gas delivery
Boron, Phosfine[1]
Optics
Beamline Column[1]
What is it?
What do the numbers mean?
Wafer handling4
Gas & chemistry2
- SDS Gas Box[1]
Optics & imaging1
- Beamline Column[1]
Performance1
- Source Extraction Alignment Jig[1]
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the VHE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VHE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the VHE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VHE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VHE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VHE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]GSD Ovation | 高電流および高エネルギーバッチ式イオン注入機 — axcelis.com (Feb 7, 2026)web.archive.org
Last updated Jul 29, 2026.
