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Comparison ledger

18 D SurfaceversusDFL 7340 Stealth Laser Dicing

Blanchard 18 D Surface, Disco DFL 7340 Stealth Laser Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
18 D SurfaceBlanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 18 D SurfaceDisco DFL 7340
Specifications
Voltage416 V[1]—
Phase3 Phase[1]—
Cycles50[1]—
Control Voltage110[1]—
MakeBlanchard[2]—
Model18 D[2]DFL7340[5]
Asset #153970[1]—
Power416 V, 3 phase[2]—
Configuration—Power supply removed[4]
OEM—Disco[5]
Process area—Packaging[5]
Purpose—Laser Stealth dicing of Si wafers[6]
Applications field—Contact-less dicing of Silicon wafers PICs, MEMS, BIO-MEMS and Semiconductor non-wet dicing[6]
Wavelength—1342 nm[5]
Maximum sample diameter—200 mm[5]
Wafer size—200 mm or smaller[6]
Compatible materials—Si wafers only[5]
Dicing orientation—Topside or backside (through tape) dicing possible[5]
Position accuracy—3 µm[6]
Feeding speed—1.0–1000 mm/s[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  6. [6]c2mi.cac2mi.ca