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Comparison ledger

18 D SurfaceversusDFL7340-stealth-dicer

Blanchard 18 D Surface, Disco DFL7340-stealth-dicer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
18 D SurfaceBlanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 18 D SurfaceDisco DFL7340-stealth-dicer
Specifications
Voltage416 V[1]—
Phase3 Phase[1]—
Cycles50[1]—
Control Voltage110[1]—
MakeBlanchard[2]—
Model18 D[2]DFL7340[4]
Asset #153970[1]—
Power416 V, 3 phase[2]—
OEM—Disco[4]
Process area—Packaging[4]
Compatible materials—Dedicated to dicing Si wafers only[4]
Laser engine wavelength—λ = 1342 nm[4]
Maximum sample diameter—200 mm[4]
Dicing orientation—Topside or backside (through tape) dicing possible[4]
Si resistivity requirement—ρ > 0.01 Ω•cm[4]
Surface roughness requirement—Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[4]
Street clearance requirement—Wafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca