Waferpedia

Comparison ledger

22 AD 42versusDFL7340-stealth-dicer

Blanchard 22 AD 42, Disco DFL7340-stealth-dicer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
22 AD 42Blanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 22 AD 42Disco DFL7340-stealth-dicer
Specifications
Phase3 Phase[1]—
Frequency60 Hz[1]—
Voltage120 Vac[1]—
ConfigurationNo coolant tank[1]—
OEM—Disco[2]
Model—DFL7340[2]
Process area—Packaging[2]
Compatible materials—Dedicated to dicing Si wafers only[2]
Laser engine wavelength—λ = 1342 nm[2]
Maximum sample diameter—200 mm[2]
Dicing orientation—Topside or backside (through tape) dicing possible[2]
Si resistivity requirement—ρ > 0.01 Ω•cm[2]
Surface roughness requirement—Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[2]
Street clearance requirement—Wafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[2]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca