Waferpedia

Comparison ledger

SH 1012 40 12 Ultrasonicversus1000P

Branson SH 1012 40 12 Ultrasonic, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMBransonYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1998 Acquisition
Control system——
Generation——
FamilyBranson SH 1012 40 12 UltrasonicYES 1000P
Specifications
Model—1000P[1]
System type—Plasma cleaning system[1]
Shelf configuration—Four 16 x 16 inch shelves[1]
Total capacity—1024 square inches[1]
Control system—PLC driven with plain English real time process readout and diagnostics in the event of system abort[1]
Number of shelves—4[1]
Shelf size—16 x 16 inches[1]
Power—1000 W[2]
Configuration—Parallel plate[2]
Operation modes—Active, RIE, Downstream[1]
Sample size range—From smallest semiconductor chip to large flat panels[1]
Type—Plasma cleaning system[1]
Shelves—Four 16 x 16 inch shelves[1]
Control—PLC driven with plain English real time process readout and diagnostics in the event of system abort[1]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]semistarcorp.comsemistarcorp.com