Comparison ledger
Brooks 017-0024-01 Prealigner, OAI Model 30, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | Model 30OAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | OAI Model 30 |
| Specifications | ||
| Product family | — | UV Exposure Systems[1] |
| Type | — | Benchtop collimated UV exposure system[2] |
| Source type | — | Stabilized arc lamp source[2] |
| Optical integrator | — | Adjustable optical integrator[2] |
| Output spectra | — | 220 nm to 450 nm[3] |
| Output power | — | 200 W to 12 kW[3] |
| Beam size | — | Up to 24 in²[3] |
| Timer range | — | 0.1 to 0.999 seconds[3] |
| Collimation | — | Reflective Köhler illumination design[2] |
| Beam divergence | — | ≤ ±1.5°[2] |
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