Comparison ledger
Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 200 CC Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | MA 200 CC MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | SUSS MicroTec MA 200 |
| Specifications | ||
| Configuration | — | With HDD & Software[1] |
| Equipment type | — | Mask aligner[1] |
| Process | — | Photolithography[1] |
| Category | — | Lithography[1] |
| Light source note | — | Only lamp light instead of UV LED light[2] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →