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SUSS MicroTec

MA 200 CC Mask

LithographySUSS MicroTec MA 200 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

MA 200 CC Mask — Inventory photo
Fig. 01MA 200 CC MaskInventory photo[1]

What it is

The SUSS MicroTec MA 200 CC Mask Aligner is a mask aligner used in photolithography.[3][1]

How it works

General reference — not yet source-verified

A mask aligner transfers a pattern from a photomask to a photosensitive layer by bringing the mask and substrate into alignment and exposing the coated surface to light. The machine supports contact-style lithographic pattern transfer used in microfabrication.

Where it fits in the process flow

General reference — not yet source-verified

The machine sits in the lithography portion of the process flow, where patterned exposure defines features on a photoresist-coated substrate before later etch or deposition steps use that pattern.

Applications

General reference — not yet source-verified

Mask aligners are used for patterning photoresist in semiconductor and microfabrication workflows, including processing of wafers and other planar substrates that require optical pattern transfer.

What do the numbers mean?

Control & software1

With HDD & Software[1]
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Configuration & options1

Only lamp light instead of UV LED Light[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the SUSS MA 200 CC?

It is a mask aligner used in lithography.[3][1]

Not publicly documented

The following facts about the MA 200 CC Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the MA 200 CC Mask are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 200 CC Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MA 200 CC Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MA 200 CC Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MA 200 CC Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
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Last updated Jul 29, 2026.

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