Comparison ledger
Brooks 017-0146-01 Prealigner, EV Group 620, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 620EV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | EV Group 620 |
| Specifications | ||
| Configuration | — | Mercury Lamp Exposure System[1] |
| Manufacturer | — | EV Group[3] |
| Model | — | 620[1] |
| Category | — | Lithography[3] |
| Tool type | — | Mask aligner[3] |
| Wafer sizes | — | 4, 6 inch[1] |
| Exposure system | — | Mercury lamp exposure system[1] |
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