EV Group

620 Mask

Lithography EV Group 620 family

Research Quality: 20% complete

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620 Mask — Inventory photo — Fig. 01620 MaskInventory photo^[1]

Power

200 V^[1]

Vacuum

6 bar / 87 psi^[2]

Performance

Backside Alignment Capability^[5]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

Joystick and numeric keypad have been removed

What do the numbers mean?

Power & electrical6

Voltage: 200 V^[1]; 50 / 60 Hz^[1]
Voltage: 208V, 1-phase, GND – 3 wire^[2]
Frequency: 50/60 Hz^[2]
Power consumption: 1.55 kW^[2]
Voltage: 208 V^[5]

Vacuum & pumping3

Compressed Air (CDA): 6 bar / 87 psi^[2]
Nitrogen or CDA: 6 bar / 87 psi^[2]
Vacuum: < 850 mbar / 6460 torr^[2]

Wafer handling1

6"; Chuck is 5"^[5]

Accurate?

Performance2

Backside Alignment Capability^[5]

Accurate?

Infrared & Backside Alignment Capability^[5]

Accurate?

Control & software1

Computer / Controller^[5]

Accurate?

Configuration & options10

Phase: 2 Phase^[1]
Current Rating: 10 A^[1]
Interrupting Capability: 50 kiloamps^[1]
Overcurrent Protection: Provided at machine terminals^[1]; Joystick and numeric keypad have been removed^[1]
Full load current rating: 7.45 A^[2]
Largest current rating: 7.45 A^[2]
Breaker size / AIC: 10 A / 10 kA^[2]; Includes;^[5]; Newport Isolation Table^[5]

Interested in this tool?

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Quintel Q 7000 Mask— Same function class: Lithography, UnknownCompare in depthsource^[6]
KLA ICOS CI 8 X 50 Lead— Same function class: Lithography, UnknownCompare in depthsource^[7]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage200 V^[1]
Configuration50 / 60 Hz^[1]
Voltage208V, 1-phase, GND – 3 wire^[2]
Frequency50/60 Hz^[2]
Power consumption1.55 kW^[2]
Compressed Air (CDA)6 bar / 87 psi^[2]
Nitrogen or CDA6 bar / 87 psi^[2]
Vacuum< 850 mbar / 6460 torr^[2]
Voltage208 V^[5]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 620 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 620 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 620 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 620 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 620 Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 620 Mask are on record.
Answerable by: an OEM parts catalog or a service engineer