Comparison ledger
Brooks 017-0146-01 Prealigner, EV Group EV 640 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | EV 640 MaskEV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | EV Group EV 640 Mask |
| Specifications | ||
| Phase | — | 3 phase[1] |
| Wafer Sizes | — | 6, 8 inch[1] |
| Manufacturer | — | EV Group[1] |
| Model | — | EV 640 Mask[1] |
| Tool type | — | Mask aligner[2] |
| Wafer sizes | — | 6 inch, 8 inch[1] |
| Power | — | 3 phase[2] |
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