Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR 1505 G 6 ENikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1988 Introduction |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR |
| Specifications | ||
| Configuration | — | 0.65um G-line[1] |
| Manufacturer | — | Nikon[1] |
| Model | — | NSR 1505 G 6 E[1] |
| Wafer size | — | 6 inch[1] |
| Process/generation | — | 0.65 um G-line[1] |
| Tool type | — | Stepper[1] |
| Introduction year | — | 1988[2] |
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