Nikon
NSR 1505 G 6 E
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA lithography stepper transfers a circuit pattern from a mask onto a photosensitive coating on a wafer by projecting light through optical reduction and then repeating the exposure field across the wafer.
A G-line lithography stepper uses near-ultraviolet mercury lamp exposure and is used for mature-node patterning where the feature set matches the optical capability of the tool class.
Where it fits in the process flow
General reference — not yet source-verifiedA lithography stepper sits in the patterning sequence after wafer preparation and photoresist coating.
A lithography stepper operates before development and downstream etch or deposition transfer steps.
Applications
General reference — not yet source-verifiedA lithography stepper is used for repeated exposure of patterned layers in semiconductor manufacturing.
A G-line stepper is used for mature-node integrated circuit fabrication and other wafer patterning tasks that do not require the finest optical resolution.
What do the numbers mean?
Wafer handling1
Configuration & options6
- 0.65um G-line[2]
Vintage & configurations
- 1988Introduction[1]
The Nikon 1505 G 6 E is described as introduced in 1988.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the Nikon NSR 1505 G 6 E use?
What exposure wavelength class does the Nikon NSR 1505 G 6 E belong to?
Not publicly documented
The following facts about the NSR 1505 G 6 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the NSR 1505 G 6 E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 1505 G 6 E are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 1505 G 6 E are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 1505 G 6 E is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR 1505 G 6 E are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
Last updated Oct 13, 2026.
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