Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon S 204 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | S 204 BNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2002– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon S 204 B |
| Specifications | ||
| OEM | — | Nikon[1] |
| Model | — | S 204 B[1] |
| Machine designation | — | NSR-S204B[2] |
| Equipment type | — | Stepper[1] |
| Exposure wavelength | — | 248nm[3] |
| Laser type | — | KrF excimer laser[3] |
| Reduction ratio | — | 4:1[3] |
| NA | — | 0.68 (max)[3] |
| Wafer size | — | 300mm[3] |
| Reticle size | — | 6"[3] |
| Field size | — | 25 x 33 mm2[3] |
| Manufactured | — | June 2002[3] |
| Category | — | Lithography[3] |
| System designation | — | NSR-S204B[2] |
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