Comparison ledger
Brooks MTX 2000 Wafer, Leica , Vistec INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MTX 2000 WaferBrooks | , Vistec INS 3000Leica |
|---|---|---|
| OEM | Brooks | Leica |
| Category | — | — |
| Wafer size | Multiple IOSS Wafer ID Reader | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks MTX 2000 Wafer | Leica , Vistec INS 3000 |
| Specifications | ||
| Configuration | 2x Fixload V6[1] | — |
| Wafer size | Multiple IOSS Wafer ID Reader[1] | Single 150/200 mm wafer loadport[3] |
| Make | Brooks[1] | — |
| Model | MTX 2000[1] | — |
| Type | Wafer Sorter[1] | Optical defect review station[3] |
| Components | 2x Fixload V6, Multiple IOSS Wafer ID Reader, 2x Brooks Robots, 2x Brooks Aligner, Greenlight Inspection Station[1] | — |
| Component | 2x Fixload V6[1] | — |
| Vintage | 2001[1] | — |
| Wafer loadport | — | Single 150/200 mm wafer loadport[3] |
| Lighting | — | Bright field light source; DIC DUV light source[3] |
| Camera | — | UV and DUV camera[3] |
| Optics | — | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[3] |
| Software | — | Viscon Software[3] |
| Data interface | — | KLARF input[3] |